Dipole-based contact structure to reduce metal-semiconductor contact resistance in MOSFETs

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United States of America Patent

PATENT NO 9589851
SERIAL NO

14800970

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Abstract

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A transistor device includes a substrate; a source region and a drain region formed over the substrate; and a source/drain contact formed in contact with at least one of the source region and the drain region, the source/drain contact including a conductive metal and a bilayer disposed between the conductive metal and the at least one of the source and drain region, the bilayer including a metal oxide layer in contact with the conductive metal, and a silicon dioxide layer in contact with the at least one of the source and drain region.

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Patent Owner(s)

  • GLOBALFOUNDRIES INC.;INTERNATIONAL BUSINESS MACHINES CORPORATION;THE RESEARCH FOUNDATION OF STATE UNIVERSITY OF NEW YORK

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bu, Huiming Millwood, US 108 1084
Li, Hui-feng Guilderland, US 3 28
Narayanan, Vijay New York, US 308 5551
Niimi, Hiroaki Cohoes, US 147 1255
Yamashita, Tenko Schenectady, US 599 4956

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