Method of forming zinc oxide film (ZnO) or magnesium zinc oxide film (ZnMgO) and apparatus for forming zinc oxide film or magnesium zinc oxide film

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United States of America Patent

PATENT NO 9598768
APP PUB NO 20110143053A1
SERIAL NO

13059356

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A method of forming a zinc oxide film or a magnesium zinc oxide film which has a high transmittance. The method of forming a zinc oxide film or a magnesium zinc oxide film includes (A) converting a solution containing zinc, or zinc and magnesium into mist, (B) heating a substrate, and (C) supplying the solution converted into mist, and ozone to a first main surface of the substrate under heating.

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Patent Owner(s)

  • TOSHIBA MITSUBISHI-ELECTRIC INDUSTRIAL SYSTEMS CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kogura, Masahisa Tokyo, JP 6 38
Orita, Hiroyuki Tokyo, JP 32 38
Shirahata, Takahiro Tokyo, JP 21 140
Yoshida, Akio Tokyo, JP 109 1343

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