Optical filter including a step section, and analytical instrument and optical apparatus using the optical filter
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United States of America Patent
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Mar 28, 2017
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N/A
app pub date -
Aug 11, 2015
filing date -
Mar 15, 2010
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Abstract
An optical filter includes a first substrate, a second substrate that is opposed to the first substrate, a first reflecting section that is disposed between the first substrate and the second substrate, a second reflecting section that is disposed between the first reflection section and the second substrate, a first gap existing between the first reflecting section and the second reflecting section, a first electrode that is disposed between the first substrate and the second substrate, a second electrode that is disposed between the first electrode and the second substrate, a second gap existing between the first electrode and the second electrode, and a third electrode that is disposed between the first substrate and the second electrode. The second gap is larger than the first gap.
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