Substrate processing apparatus and substrate processing system

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United States of America Patent

PATENT NO 9606454
SERIAL NO

14022657

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Abstract

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A substrate processing apparatus includes a processing section and an exposure transport section. The exposure transport section includes a horizontal transport region and a plurality of vertical transport regions in a casing. The horizontal transport region is provided at the upper portion of the casing to extend in the X direction. A plurality of exposure devices are arranged below the horizontal transport region to be lined up in the X direction. A transport mechanism is provided in the horizontal transport region. The transport mechanism is configured to be capable of transporting a substrate between the processing section and the plurality of exposure devices.

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Patent Owner(s)

Patent OwnerAddress
SCREEN SEMICONDUCTOR SOLUTIONS CO LTDKYOTO

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kuwahara, Joji Kyoto, JP 38 103
Taguchi, Takashi Kyoto, JP 43 544

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