Ultra thin radiation window and method for its manufacturing

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United States of America Patent

PATENT NO 9607723
SERIAL NO

13700791

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Abstract

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For manufacturing a radiation window for an X-ray measurement apparatus, and etch stop layer is first produced on a polished surface of a carrier. A thin film deposition technique is used to produce a structural layer on an opposite side of said etch stop layer than said carrier. The combined structure comprising said carrier, said etch stop layer, and said structural layer is attached to a region around an opening in a support structure with said structural layer facing said support structure. The carrier is etched away.

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Patent Owner(s)

  • HS FOILS OY

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Sipilä, Heikki Johannes Espoo, FI 10 20

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