Method of delivering a process gas from a multi-component solution

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United States of America Patent

PATENT NO 9610550
APP PUB NO 20150068611A1
SERIAL NO

14387872

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Abstract

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A method and chemical delivery system are provided. The method includes providing a vapor phase of a multi-component liquid source. The method further includes contacting a pre-loaded carrier gas with the vapor phase, wherein the pre-loaded carrier gas includes a carrier gas and at least one component of the multi-component liquid source and delivering a gas stream comprising at least one component of the liquid source to a critical process or application, wherein the amount of the component in the carrier gas is sufficient to keep the ratio of components in the multi-component liquid source relatively constant. The chemical delivery system includes a multi-component liquid source having a vapor phase. The system further includes a pre-loaded carrier gas source that is in fluid contact with the vapor phase, wherein the pre-loaded carrier gas includes a carrier gas and at least one component of the liquid source and an apparatus for delivering a gas stream including at least one component of the liquid source, wherein the amount of the component in the pre-loaded carrier gas is sufficient to keep the ratio of components in the multi-component liquid source relatively constant.

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Patent Owner(s)

Patent OwnerAddress
RASIRC INC7815 SILVERTON AVENUE SAN DIEGO CA 92126

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Alvarez,, Jr Daniel Oceanside, US 27 86
Heinlein, Edward San Diego, US 11 34
Holmes, Russell J San Diego, US 36 283
Shamsi, Zohreh San Diego, US 4 15
Spiegelman, Jeffrey San Diego, US 4 17

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