Method and apparatus for separation of workpieces and articles produced thereby

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United States of America Patent

PATENT NO 9610653
SERIAL NO

14032829

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The present invention is a method for separating a workpiece from a common substrate. It includes the steps of providing the workpiece, generating, within a beam source, a beam of laser pulses configured to modify a portion of the workpiece, determining a depth for creating a modified region based upon a characteristic of the workpiece and modifying a plurality of regions within the workpiece to form a plurality of modified regions. Modifying the plurality of regions includes directing the beam of laser pulses from an output of the beam source onto the workpiece, causing relative motion between the workpiece and the output of the beam source while directing the beam of laser pulses onto workpiece, and modifying a characteristic of the pulses of the beam upon generating a number of pulses which generally correspond to creating the modified regions to the determined depth.

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Patent Owner(s)

  • ELECTRO SCIENTIFIC INDUSTRIES, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Brookhyser, James Portland, US 12 37
Darwin, Michael Portland, US 4 26
Frankel, Joe Beaverton, US 1 11
Pysher, Matthew Fremont, US 1 11
Rekow, Mathew Santa Cruz, US 14 65
Rundel, Jack Portland, US 2 11
Shan, Fang San Jose, US 3 25
Simenson, Glenn Portland, US 20 470
Xu, Qian Portland, US 201 1138
Zhang, Haibin Portland, US 72 991
Zhang, Min Fremont, US 340 2213

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