Method of surface tension control to reduce trapped gas bubbles

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United States of America Patent

PATENT NO 9610712
SERIAL NO

15044962

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Abstract

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The embodiments disclose a method of surface tension control to reduce trapped gas bubbles in an imprint including modifying chemistry aspects of interfacial surfaces of an imprint template and a substrate to modify surface tensions, differentiating the interfacial surface tensions to control interfacial flow rates of a pre-cured liquid resist and controlling pre-cured liquid resist interfacial flow rates to reduce trapping gas and prevent trapped gas bubble defects in cured imprinted resist.

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Patent Owner(s)

  • SEAGATE TECHNOLOGY LLC

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Gauzner, Gennady San Jose, US 32 356
Kurataka, Nobuo Campbell, US 30 206
Park, Sang-Min San Jose, US 45 388

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