Semiconductor device

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United States of America Patent

PATENT NO 9613884
SERIAL NO

14872868

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Abstract

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Provided is a semiconductor device. The semiconductor device includes a substrate including a cantilever configured to generate a flow of cooling media through dynamic movement, an active area on the substrate which an electronic device is provided on, an insulation layer disposed to be spaced apart from the active area on the substrate, a lower electrode on the insulation layer, a piezoelectric film on the lower electrode, and an upper electrode on the piezoelectric film.

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Patent Owner(s)

  • ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Jun, Chi Hoon Daejeon, KR 55 876
Jung, Dong Yun Anyang-si, KR 22 37
Ko, Sang Choon Daejeon, KR 39 292
Lee, Hyung Seok Seongnam-si, KR 41 149
Na, Jeho Seoul, KR 14 12
Nam, Eun Soo Daejeon, KR 89 500

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