Quantum capacitance graphene varactors and fabrication methods

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United States of America Patent

PATENT NO 9614107
SERIAL NO

14720370

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Abstract

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A plate varactor includes a dielectric substrate and a first electrode embedded in a surface of the substrate. A capacitor dielectric layer is disposed over the first electrode, and a layer of graphene is formed over the dielectric layer to contribute a quantum capacitance component to the dielectric layer. An upper electrode is formed on the layer of graphene. Other embodiments and methods for fabrication are also included.

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Patent Owner(s)

  • INTERNATIONAL BUSINESS MACHINES CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Zhihong West Lafayette, US 43 478
Han, Shu-Jen Cortlandt Manor, US 225 1504
Koswatta, Siyuranga O Carmel, US 19 158
Valdes, Garcia Alberto Hartsdale, US 102 467

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