Power supply apparatus outputting alternating-current voltage to plasma generator

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United States of America Patent

PATENT NO 9615440
APP PUB NO 20160234922A1
SERIAL NO

15024688

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Abstract

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A current-limiting reactor that regulates a short-circuit current, a controller that controls an action of an inverter, and a detection unit that detects a short circuit. The controller causes the inverter to stop when a short circuit has occurred.

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Patent Owner(s)

  • TOSHIBA MITSUBISHI-ELECTRIC INDUSTRIAL SYSTEMS CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Nakamura, Noriyuki Tokyo, JP 66 655
Nishimura, Shinichi Tokyo, JP 89 719
Okihara, Yujiro Tokyo, JP 22 522
Tabata, Yoichiro Tokyo, JP 48 1185

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