Bubble and foam solutions using a completely immersed air-free feedback flow control valve
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United States of America Patent
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Apr 11, 2017
Grant Date -
Jun 19, 2014
app pub date -
Dec 10, 2013
filing date -
Dec 11, 2012
priority date (Note) -
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Abstract
The embodiments disclosed herein relate to methods and apparatus for promoting bubble-free circulation of processing fluids in a recirculation system. Certain disclosed techniques involve passive, mechanical valve designs that promote variable resistance to flow in a drain. Other techniques involve automated flow control schemes that utilize feedback from flow meters, level sensors, etc. to achieve a balanced and bubble-free flow. The disclosed embodiments greatly reduce the incorporation of gas into a processing fluid, in particular as the processing fluid returns from a processing cell to a reservoir.
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