Thin film capacitor

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9620291
APP PUB NO 20160020030A1
SERIAL NO

14799247

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A thin film capacitor including a lower electrode layer, a dielectric layer provided on the lower electrode layer, and an upper electrode layer formed on the dielectric layer, wherein the dielectric layer includes a recessed portion in a portion on the upper face thereof, a cross-sectional structure perpendicular to the dielectric layer of the recessed portion has a cross-sectional taper angle of 1 degree or more and 25 degrees or less, and the distance between the bottom portion center and an outermost portion of the recessed portion is 20 times or more and 150 times or less a thickness of the dielectric layer.

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Patent Owner(s)

Patent OwnerAddress
TDK CORPORATIONTOKYO 103-6128

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Aburakawa, Yuuki Tokyo, JP 13 121
Aotani, Junji Tokyo, JP 12 190
Kurachi, Katsuyuki Tokyo, JP 20 154
Namikawa, Tatsuo Tokyo, JP 20 136
Tanaka, Shigeaki Tokyo, JP 65 1073

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