Controlling alignment during a thermal cycle

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United States of America Patent

PATENT NO 9625521
SERIAL NO

14583545

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Abstract

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A method of testing an integrated circuit of a device is described. Air is allowed through a fluid line to modify a size of a volume defined between the first and second components of an actuator to move a contactor support structure relative to the apparatus and urge terminals on the contactor support structure against contacts on the device. Air is automatically released from the fluid line through a pressure relief valve when a pressure of the air in the fluid line reaches a predetermined value. The holder is moved relative to the apparatus frame to disengage the terminals from the contacts while maintaining the first and second components of the actuator in a substantially stationary relationship with one another. A connecting arrangement is provided including first and second connecting pieces with complementary interengaging formations that restricts movement of the contactor substrate relative to the distribution board substrate in a tangential direction.

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Patent Owner(s)

Patent OwnerAddress
AEHR TEST SYSTEMS400 KATO TERRACE FREMONT CA 94539

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Jovanovic, Jovan Santa Clara, US 72 612
Lindsey, Scott E Brentwood, US 64 773
Malathong, Seang P Newark, US 12 179
Yeh, Junjye Livermore, US 7 96

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