Substrate transfer apparatus, substrate transfer method, and storage medium
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United States of America Patent
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Apr 18, 2017
Issued Date -
N/A
app pub date -
Dec 20, 2013
filing date -
Dec 25, 2012
priority date (Note) -
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Abstract
A substrate transfer apparatus unloads a substrate from a transfer container in which a cover body airtightly closes a substrate unloading opening formed at a front surface of a container main body and multiple substrates are accommodated in the form of shelves. The substrate transfer apparatus includes a load port to which the transfer container is loaded; a detection unit configured to detect an accommodation status of the substrate in the container main body that is loaded to the load port and separated from the cover body; a substrate transfer device configured to enter the container main body and unload the substrate; and a correction device configured to correct the accommodation status of the substrate in the container main body before the substrate is unloaded from the container main body by the substrate transfer device when the detection unit detects abnormality in the accommodation status.
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