Polishing composition

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United States of America Patent

PATENT NO 9631121
APP PUB NO 20150152290A1
SERIAL NO

14403497

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Abstract

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A polishing composition is used to polish a polishing subject having a phase change alloy. The polishing composition includes abrasive grains and a brittle film formation agent. The brittle film formation agent is at least one or more selected from a saturated monocarboxylic acid and an organophosphorus compound.

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Patent Owner(s)

  • FUJIMI INCORPORATED

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Izawa, Yoshihiro Kiyosu, JP 35 530
Yoshizaki, Yukinobu Kiyosu, JP 28 75

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