Raw material vaporizing and supplying apparatus equipped with raw material concentration

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United States of America Patent

PATENT NO 9631777
APP PUB NO 20140299206A1
SERIAL NO

14343226

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An apparatus able to regulate a raw material concentration, in a mixed gas of carrier gas and raw material gas, accurately and stably to supply the mixed gas to a process chamber, with a flow rate controlled highly accurately, thereby detecting a vapor concentration of the raw material gas in the mixed gas easily and highly accurately and displaying the concentration in real time without using an expensive concentration meter, etc.

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Patent Owner(s)

  • FUJIKIN INCORPORATED

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hidaka, Atushi Osaka, JP 1 10
Hirata, Kaoru Osaka, JP 69 820
Ikeda, Nobukazu Osaka, JP 232 4012
Nagase, Masaaki Osaka, JP 84 982
Nakamura, Takeshi Osaka, JP 561 5492
Nishino, Kouji Osaka, JP 165 2271

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