Method of treating an exhaust gas stream

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United States of America Patent

PATENT NO 9631810
APP PUB NO 20120090338A1
SERIAL NO

13143708

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Abstract

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The present invention provides a method of treating an exhaust gas stream 12 from a processing chamber 10. The method comprises the steps of: conveying the exhaust gas from the processing chamber using a vacuum pumping arrangement 11, 22 or atmospheric line; abating the exhaust gas in an abatement region 18 of an abatement device 14; and injecting a cooling agent, such as a liquid 26, downstream of the abatement region to cool the abated gases in a cooling region 24 by phase change of the cooling agent.

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Patent Owner(s)

  • EDWARDS LIMITED

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Czerniak, Michael Roger Wellington, GB 10 38
Stanton, Gareth David Clevedon, GB 10 19

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