Laminated polishing pad and method for producing same

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United States of America Patent

PATENT NO 9636796
SERIAL NO

14390959

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A method for manufacturing a laminated polishing pad of the present invention, comprising the steps of: forming a polishing layer by providing a light transmitting region in an opening A of a polishing region; providing an adhesive member X on one side of the polishing layer, wherein the adhesive member X contains a hot-melt adhesive; providing a removable protective member on a part of the adhesive member X corresponding to the light transmitting region; bonding a support layer to the adhesive member X on which the removable protective member is provided; and removing a part of the support layer corresponding to the light transmitting region and also removing the removable protective member to form an opening B.

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First Claim

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Patent Owner(s)

  • ROHM AND HAAS ELECTRONIC MATERIALS CMP HOLDINGS, INC.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Nakamura, Kenji Osaka, JP 547 8080

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