Defect coordinates measurement device, defect coordinates measurement method, mask manufacturing method, and reference mask

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United States of America Patent

PATENT NO 9638739
SERIAL NO

13791537

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Abstract

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A defect coordinates measurement method includes a step of detecting detected coordinates of a fiducial mark and a defect of a mask blank placed on support pins, a step of detecting detected coordinates of the alignment mark of a reference mask placed on the support pins, a step of extracting a reference mark near the detected coordinates of the defect among the plurality of reference marks based on the detected coordinates of the defect of the mask blank and the alignment mark of the reference mask, a step of detecting detected coordinates of the extracted reference mark, and a step of calculating coordinates of the defect based on the detected coordinates of the reference mark and the detected coordinates of the defect.

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Patent Owner(s)

Patent OwnerAddress
LASERTEC CORPORATION2-10-1 SHIN-YOKOHAMA KOHOKU-KU YOKOHAMA KANAGAWA 222-8552

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kusunose, Haruhiko Yokohama, JP 34 385
Miyai, Hiroki Yokohama, JP 9 33

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