Feedback for buffer layer deposition

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9640705
SERIAL NO

14709262

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

Improved methods and apparatus for forming thin film layers of chalcogenide on a substrate web. According to the present teachings, a feedback control system may be employed to measure one or more properties of the web and/or the chalcogenide layer, and to adjust one or more parameters of the system or buffer layer deposition method in response to the measurement.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
SUN HARMONICS CO LTD399 XINGGUO RD LINPING DISTRICT HANGZHOU ZHEJIANG 311103

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Albright, Scot Tucson, US 19 113
Britt, Jeffrey S Tucson, US 43 702
Schoop, Urs Tucson, US 22 93

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
11.5 Year Payment $7400.00 $3700.00 $1850.00 Nov 2, 2028
Fee Large entity fee small entity fee micro entity fee
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00