Substrate cleaning apparatus

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9643215
APP PUB NO 20140075690A1
SERIAL NO

13963743

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A substrate cleaning apparatus is provided. The substrate cleaning apparatus includes a plurality of transfer rollers for transferring a substrate; a liquid chemical feeder supplying a liquid chemical to a first surface of the substrate; wherein the liquid chemical feeder comprises a first housing and a first cleaning roller rotatably installed within the housing and having an upper portion configured to contact with the substrate.

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Patent Owner(s)

Patent OwnerAddress
SAMSUNG DISPLAY CO LTDGYEONGGI DO SOUTH KOREA GYEONGGI-DO

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hahn, Sohra Yongin, KR 1 3
Lee, Seung-Jun Yongin, KR 188 1566
Shin, Dong-Myung Yongin, KR 15 73
You, Jung-Hwa Yongin, KR 1 3

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