Compound, resin and photoresist composition

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United States of America Patent

PATENT NO 9644056
APP PUB NO 20160237190A1
SERIAL NO

15042880

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Abstract

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A compound represented by formula (I):

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Patent Owner(s)

  • SUMITOMO CHEMICAL COMPANY, LIMITED

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ichikawa, Koji Osaka, JP 299 1930
Masuyama, Tatsuro Osaka, JP 69 347
Suzuki, Yuki Osaka, JP 120 204

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