Apparatus for coating substrates using the EB/PVD method

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United States of America Patent

PATENT NO 9644259
APP PUB NO 20130032092A1
SERIAL NO

13642086

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An apparatus for coating substrates with a coating material is disclosed. The apparatus includes a frame, a crucible arrangement including a first crucible and a second crucible disposed offset from one another in a horizontal plane, where the crucible arrangement is disposed on the frame. At least one first shaft is associated with the first crucible and at least one second shaft is associated with the second crucible, where the at least one first and second shafts are disposed in the frame beneath the first and second crucibles, respectively. A first lifting device is associated with the at least one first shaft and a second lifting device is associated with the at least one second shaft, where the first and second lifting devices are disposed in the frame. The frame is linearly displaceable in the horizontal plane.

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Patent Owner(s)

Patent OwnerAddress
ALD VACUUM TECHNOLOGIES GMBHOTTO-VON-GUERICKE-PLATZ 1 HANAU 63457

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Eberhardt, Helmut Gruendau, DE 8 49
Hotz, Juergen Muenster, DE 5 63
Kirschner, Manfred Michelstadt, DE 15 32
Rieth, Wolfgang Gelnhausen, DE 2 7
Seserko, Pavel Karlstein, DE 4 23
Wittich, Joerg Otzberg, DE 2 11

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