Heater moving type substrate processing apparatus

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United States of America Patent

PATENT NO 9644895
APP PUB NO 20150044622A1
SERIAL NO

14385511

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Abstract

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Provided is a substrate processing apparatus. The substrate processing apparatus includes a chamber providing an inner space in which a process with respect to a substrate is performed, a heating plate on which the substrate is placed, the heating plate being fixedly disposed within the chamber, a heater spaced from a lower portion of the heating plate to heat the heating plate, and a lift module lifting the heater.

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Patent Owner(s)

Patent OwnerAddress
EUGENE TECHNOLOGY CO LTD42 CHUGYE-RO YANGJI-MYEON CHEOIN-GU YONGIN-SI GYEONGGI-DO 17156

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kim, Kyong-Hun Gyeonggi-do, KR 26 378
Kim, Yong-Ki Chungcheongnam-do, KR 59 824
Shin, Yang-Sik Gyeonggi-do, KR 24 649
Song, Byoung-Gyu Gyeonggi-do, KR 23 646
Yang, Il-Kwang Gyeonggi-do, KR 30 378

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