Measurement device and purge gas flow rate measuring method
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United States of America Patent
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May 9, 2017
Grant Date -
Dec 24, 2015
app pub date -
Jan 30, 2014
filing date -
Mar 5, 2013
priority date (Note) -
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status (Latency Note)
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Abstract
A purge gas flow rate in a carrier that houses a smaller number of articles than a usual number is measured. The flow rate of the purge gas supplied from a nozzle of a shelf support in a rack is measured by a measurement device. The measurement device includes a substrate, a gas introduction section provided on a bottom surface of the substrate and configured to introduce the purge gas when coming into contact with the nozzle of the shelf support, while maintaining contact with the nozzle airtight with a load from the substrate, a circuit including a flowmeter that measures the purge gas flow rate and a power supply, and a plurality of legs movable in a vertical direction with respect to the substrate and defining a portion of the weight of the measurement device supported on the shelf support.
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