Integrated circuit containing standard logic cells and library-compatible, NCEM-enabled fill cells, including at least via-open-configured, AACNT-short-configured, TS-short-configured, and metal-short-configured, NCEM-enabled fill cells

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United States of America Patent

PATENT NO 9646961
SERIAL NO

15390912

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Abstract

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An IC includes logic cells, selected from a standard cell library, and fill cells, configured for compatibility with the standard logic cells. The fill cells contain structures configured to obtain in-line data via non-contact electrical measurements (“NCEM”). The IC includes such NCEM-enabled fill cells configured to enable detection and/or measurement of a variety of open-circuit and short-circuit failure modes, including at least one via-open-related failure mode, one AACNT-short-related failure mode, one TS-short-related failure mode, and one metal-short-related failure mode.

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Patent Owner(s)

Patent OwnerAddress
PDF SOLUTIONS INC2858 DE LA CRUZ BLVD SANTA CLARA CA 95050

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Brozek, Tomasz Morgan Hill, US 87 285
Cheng, Jeremy San Jose, US 117 290
Ciplickas, Dennis San Jose, US 88 366
Comensoli, Simone Darfo Boario Terme, IT 80 96
De, Indranil Mountain View, US 118 981
Doong, Kelvin Hsinchu, TW 81 177
Eisenmann, Hans Tutzing, DE 85 143
Fiscus, Timothy New Galilee, US 81 105
Haigh, Jonathan Pittsburgh, US 98 217
Hess, Christopher Belmont, US 123 1303
Kibarian, John Los Altos Hills, US 89 528
Lam, Stephen Freemont, US 123 1959
Lee, Sherry Monte Sereno, US 88 368
Liao, Marci Santa Clara, US 80 96
Lin, Sheng-Che Hsinchu, TW 86 96
Matsuhashi, Hideki Santa Clara, US 84 133
Michaels, Kimon Monte Sereno, US 88 271
O'Sullivan, Conor Campbell, US 93 243
Rauscher, Markus Munich, DE 89 820
Rovner, Vyacheslav Pittsburgh, US 80 96
Strojwas, Andrzej Pittsburgh, US 81 114
Strojwas, Marcin Pittsburgh, US 80 96
Taylor, Carl Pittsburgh, US 90 1035
Vallishayee, Rakesh Dublin, US 83 345
Weiland, Larg Hollister, US 81 96
Yokoyama, Nobuharu Tokyo, JP 80 96

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