Encapsulation of magnetic tunnel junction structures in organic photopatternable dielectric material
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United States of America Patent
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May 9, 2017
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Dec 7, 2015
filing date -
Dec 7, 2015
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Abstract
Methods and devices are provided to construct magnetic devices, such as magnetic random access memory devices, having MTJ (magnetic tunnel junction) structures encapsulated in organic photopatternable dielectric material. For example, a method includes forming an MTJ structure on a semiconductor substrate, encapsulating the MTJ structure in a layer of organic photopatternable dielectric material, patterning the layer of organic photopatternable dielectric material to form a contact opening in the layer of organic photopatternable dielectric material to the MTJ structure, and filling the contact opening with metallic material.
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