Sputtering device and sputtering method

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United States of America Patent

PATENT NO 9650710
APP PUB NO 20150200383A1
SERIAL NO

14297105

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Abstract

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One or more embodiments of the present invention relate to a sputtering device and a sputtering method. By using the sputtering device according to the present embodiment, characteristics of a deposition layer formed at the organic light emitting display apparatus may be improved, thereby improving electric characteristics and image quality of the organic light emitting display apparatus may be improved.

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Patent Owner(s)

  • SAMSUNG DISPLAY CO., LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Choi, Seung-Ho Yongin, KR 36 209
Lee, Yong-Suk Yongin, KR 38 569

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