Optical method and system for detecting defects in three-dimensional structures

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United States of America Patent

PATENT NO 9651498
APP PUB NO 20150192527A1
SERIAL NO

14412479

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Abstract

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A method and system are presented for use in inspection of via containing structures. According to this technique, measured data indicative of a spectral response of a via-containing region of a structure under measurements is processed, and, upon identifying a change in at least one parameter of the spectral response with respect to a spectral signature of the via-containing region, output data is generated indicative of a possible defect at an inner surface of the via.

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Patent Owner(s)

Patent OwnerAddress
NOVA LTDP O BOX 1630 DAVID FIKES 5 7632805 REHOVOT 7632805

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Barak, Gilad Rehovot, IL 63 476
Belleli, Alon Gedera, IL 2 4
Dotan, Elad Talmei Yehiel, IL 7 4

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