Trench metal-insulator-metal capacitor with oxygen gettering layer

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United States of America Patent

PATENT NO 9653534
SERIAL NO

14572974

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Abstract

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A method including forming an oxygen gettering layer on one side of an insulating layer of a deep trench capacitor between the insulating layer and a substrate, the oxygen gettering layer including an aluminum containing compound, and depositing an inner electrode on top of the insulating layer, the inner electrode including a metal.

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Patent Owner(s)

  • INTERNATIONAL BUSINESS MACHINES CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ando, Takashi Tuckahoe, US 717 5576
Cartier, Eduard A New York, US 89 1900
Chudzik, Michael P Sunnyvale, US 140 2526
Dasgupta, Aritra Wappingers Falls, US 21 116
Ho, Herbert L New Windsor, US 96 1935
Kang, Donghun Hopewell Junction, US 16 124
Krishnan, Rishikesh Painted Post, US 53 247
Narayanan, Vijay New York, US 308 5568
Rim, Kern Yorktown Heights, US 191 2719

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