Laser processing apparatus
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
May 23, 2017
Issued Date -
N/A
app pub date -
May 1, 2015
filing date -
May 9, 2014
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A laser processing apparatus includes a holding table for holding a workpiece, a laser beam applying unit for applying a laser beam to the workpiece, a feeding mechanism for relatively moving the holding table and the laser beam applying unit, a detector for applying detection light to the workpiece and detecting the quantity of reflected light obtained by the reflection of the detection light from the workpiece, and a controller for determining whether or not the workpiece is present at a laser beam applying position according to a detection signal output from the detector. The holding table includes a holding member for holding the workpiece under suction and an annular mount member provided so as to surround the holding member for mounting the holding member. The mount member has an upper surface treated by an irregular reflection process for irregularly reflecting light.
First Claim
Family
International Classification(s)
- [Classification Symbol]
- [Patents Count]
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully