Apparatus for laminating substrates
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United States of America Patent
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May 23, 2017
Grant Date -
Jul 2, 2009
app pub date -
Jan 2, 2008
filing date -
Jan 2, 2008
priority date (Note) -
In Force
status (Latency Note)
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Abstract
An apparatus for laminating substrates includes a laminating fixture having an open-topped recessed space formed by a pair of corresponding sidewalls for holding a target substrate therein. The recessed space is communicable with an air evacuation passage. A supporting structure is formed in the recessed space for supporting two opposite ends of a flexible substrate thereon, such that a bottom of the flexible substrate is spaced from a laminating surface of the target substrate by a predetermined distance. A soft plate is disposed over the open-topped laminating fixture to form an airtight chamber in the laminating fixture. When the airtight chamber is vacuumed using a vacuum pump via the evacuation passage, the soft plate is subjected to a suction pressure and downward deformed to press the flexible substrate downward, causing the flexible substrate to deflect to attach its bottom on the laminating surface of the target substrate.
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