System for viewing samples that are undergoing ellipsometric investigation in real time

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United States of America Patent

PATENT NO 9658151
APP PUB NO 20150185136A1
SERIAL NO

14544706

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Abstract

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In the context of an ellipsometer or the like, positioning a camera other than directly above a sample being investigated by an electromagnetic beam, while said camera provides an optical view of a surface of said sample which is in focus over the entire viewed extent of the sample, and wherein a contrast improving system involving two beams provided by a beam splitting system is utilized.

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Patent Owner(s)

  • J.A. WOOLLAM CO., INC.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Liphardt, Martin M Lincoln, US 120 796
Pfeiffer, Galen L Roca, US 39 441

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