Atomic flux measurement device

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United States of America Patent

PATENT NO 9658191
APP PUB NO 20130124124A1
SERIAL NO

13733594

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Abstract

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An atomic flux measurement device for measuring the amount of dissociated atomic flux produced by discharge and emitted from a plasma generation cell into a vacuum camber. The atomic flux measurement device includes a counter electrode body including a pair of first and second sheet-like electrodes that are arranged substantially parallel to each other with a predetermined spacing between them, a direct-current power supply configured to maintain the first sheet-like electrode at a negative potential so that atoms attached to the inner surface of the sheet-like electrode undergo self-ionization and to apply a direct-current voltage between the first and second sheet-like electrodes so that a current flows between the first and second sheet-like electrodes, and a direct-current ammeter configured to measure a current flowing due to electrons emitted by the self-ionization of the dissociated atoms attached to the inner surface of the first sheet-like electrode.

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Patent Owner(s)

Patent OwnerAddress
THE DOSHISHA601 GEMBU-CHO KARASUMA-HIGASHI-IRU IMADEGAWA-DORI KAMIGYO-KU KYOTO-SHI KYOTO 602-8580
ARIOS INC2-20 MUSASHINO 3-CHOME AKISHIMA-SHI TOKYO 1960021

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ariyada, Osamu Tokyo, JP 2 1
Ohachi, Tadashi Kyoto, JP 4 18
Wada, Motoi Kyoto, JP 3 4
Yamabe, Nobuhiko Kyoto, JP 1 0

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