Monolithic three-axis magnetic field sensor
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United States of America Patent
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May 23, 2017
Grant Date -
Oct 8, 2015
app pub date -
Oct 10, 2013
filing date -
Oct 12, 2012
priority date (Note) -
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Abstract
A three-axis magnetic sensor or magnetometer is provided. Two magnetic sensor Wheatstone bridges using barber pole AMR structures are fabricated on opposite sides of a bump structure formed on a substrate to provide surfaces that are at a predetermined angle with respect to the flat surface of the substrate. The bridge assembly is oriented along the Y axis and the bridges are interconnected such that Y and Z channel signals can be produced by processing of the bridge signals. The X channel signals are provided by an X axis sensor provided on the level surface of the substrate.
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