Systems and methods for dynamic semiconductor process scheduling

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United States of America Patent

PATENT NO 9659799
APP PUB NO 20140067110A1
SERIAL NO

13597108

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Abstract

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Embodiments of the present disclosure can help increase throughput and reduce resource conflicts and delays in semiconductor processing tools. An exemplary method according to various aspects of the present disclosure includes analyzing, by a computer program operating on a computer system, a plurality of expected times to complete each of a respective plurality of actions to be performed by a semiconductor processing tool, the semiconductor processing tool including a first process module and a second process module.

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Patent Owner(s)

  • ASM IP HOLDING B.V.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Givens, Michael E Phoenix, US 13 3355
Lawson, Keith R Phoenix, US 3 1892

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