Transparent gas barrier film, method for producing transparent gas barrier film, organic EL element, solar battery, and thin film battery
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United States of America Patent
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May 23, 2017
Grant Date -
Oct 16, 2014
app pub date -
Dec 14, 2012
filing date -
Dec 27, 2011
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Abstract
A transparent gas barrier film that has excellent gas barrier properties and includes a transparent gas barrier layer having a very low internal stress, and a method for producing the same. The transparent gas barrier film according to the present invention includes: a resin substrate; and a transparent gas barrier layer formed over the resin substrate. The transparent gas barrier layer includes at least one kind selected from the group consisting of metals and metalloids. The transparent gas barrier layer includes a plurality of layers each having a density that changes continuously from high density to low density or from low density to high density and then cycles alternatively from low density to high density or high density to low density, respectively, once or two or more times.
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