Insulation machine platform, substrate-contact type apparatus, and static electricity elimination method
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United States of America Patent
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May 23, 2017
Issued Date -
N/A
app pub date -
Jun 16, 2015
filing date -
Mar 17, 2015
priority date (Note) -
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Abstract
The present disclosure provides an insulation machine platform, a substrate-contact type apparatus, and a static electricity elimination method. The insulation machine platform includes: a machine platform body including at least one vent hole, and at least one static electricity elimination device; the at least one vent hole corresponds to the at least one static electricity elimination device being located at a position corresponding to the at least one vent hole, respectively, wherein the machine platform body has a supporting surface, underneath which the static electricity elimination device is located, for receiving a substrate. The substrate-contact type apparatus includes the insulation machine platform.
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