Thin films having large temperature coefficient of resistance and methods of fabricating same
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United States of America Patent
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May 30, 2017
Grant Date -
May 29, 2014
app pub date -
Nov 28, 2012
filing date -
Nov 28, 2012
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Abstract
An apparatus comprises a head transducer and a resistive temperature sensor provided on the head transducer. The resistive temperature sensor comprises a first layer comprising a conductive material and having a temperature coefficient of resistance (TCR) and a second layer comprising at least one of a specular layer and a seed layer. A method is disclosed to fabricate such sensor with a laminated thin film structure to achieve a large TCR. The thicknesses of various layers in the laminated thin film are in the range of few to a few tens of nanometers. The combinations of the deliberately optimized multilayer thin film structures and the fabrication of such films at the elevated temperatures are disclosed to obtain the large TCR.
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