Methods of forming a non-volatile resistive oxide memory cell and methods of forming a non-volatile resistive oxide memory array
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United States of America Patent
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May 30, 2017
Grant Date -
Sep 8, 2016
app pub date -
May 16, 2016
filing date -
Jul 2, 2008
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Abstract
A method of forming a non-volatile resistive oxide memory cell includes forming a first conductive electrode of the memory cell as part of a substrate. Metal oxide-comprising material is formed over the first conductive electrode. Etch stop material is deposited over the metal oxide-comprising material. Conductive material is deposited over the etch stop material. A second conductive electrode of the memory cell which comprises the conductive material received is formed over the etch stop material. Such includes etching through the conductive material to stop relative to the etch stop material and forming the non-volatile resistive oxide memory cell to comprise the first and second conductive electrodes having both the metal oxide-comprising material and the etch stop material therebetween. Other implementations are contemplated.
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