Sensor structure for sensing pressure waves and ambient pressure

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United States of America Patent

PATENT NO 9670059
APP PUB NO 20160200567A1
SERIAL NO

15077925

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Abstract

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In various embodiments, a sensor structure is provided. The sensor structure may include a first conductive layer; an electrode element; and a second conductive layer arranged on an opposite side of the electrode element from the first conductive layer. The first conductive layer and the second conductive layer may form a chamber. The pressure in the chamber may be lower than the pressure outside of the chamber.

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Patent Owner(s)

Patent OwnerAddress
INFINEON TECHNOLOGIES AG85579 NEUBIBERG

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Dehe, Alfons Reutlingen, DE 163 2622
Helm, Roland Munich, DE 8 85

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