Substrate freeze dry apparatus and method

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United States of America Patent

PATENT NO 9673037
SERIAL NO

13273090

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Abstract

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An apparatus for freeze drying a substrate is provided. A chamber for receiving a substrate is provided. An electrostatic chuck (ESC) for supporting and electrostatically clamping the substrate is within the chamber. A temperature controller controls the temperature of the electrostatic chuck. A condenser is connected to the chamber. A vacuum pump is in fluid connection with the chamber.

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Patent Owner(s)

  • LAM RESEARCH CORPORATION;LAW RESEARCH CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hymes, Diane San Jose, US 13 100
Schoepp, Alan M Ben Lemond, US 39 1424
Sirard, Stephen M Austin, US 19 108

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