Integrated inductor for integrated circuit devices

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United States of America Patent

PATENT NO 9673268
SERIAL NO

13976439

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A three-dimensional inductor is formed in an integrated circuit die using conductive through-body-vias which pass through the body of the die and contact one or more metal interconnect layers on the front side of the die and terminate on the back side of the die. In another embodiment, the through-body-vias may pass through a dielectric material disposed in a plug in the body of the die. In yet another aspect, a transformer may be formed by coupling multiple inductors formed using through-body-vias. In still another aspect, a three-dimensional inductor may include conductors formed of stacks of on chip metallization layers and conductive through-layer-vias disposed in insulation layers between metallization layers. Other embodiments are described.

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Patent Owner(s)

  • INTEL CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Duevel, Andreas Almstedt, DE 4 40
Kamgaing, Telesphor Chandler, US 273 1486
Rao, Valluri R Saratoga, US 67 1140
Zillmann, Uwe Braunschweig, DE 15 137

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