Apparatus and method for forming organic thin film and manufacturing method of organic thin film device using the same

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United States of America Patent

PATENT NO 9673395
APP PUB NO 20150263286A1
SERIAL NO

14715878

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Abstract

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Provided is an organic thin film forming apparatus, an organic thin film forming method, and a method of manufacturing an organic thin film device using the same, in which an organic light-emitting layer (photoactive layer) and/or an electron transport layer can be formed on a substrate when an organic light emitting diode (OLED) or an organic solar cell is manufactured. The organic thin film forming apparatus includes: a solution spray unit for spraying a solution on a substrate; and a hot gas spray unit for spraying a hot gas onto fine liquid droplets that have been sprayed from the solution spray unit and that are in flight, to thereby evaporate a solvent contained in the fine liquid droplets.

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Patent Owner(s)

  • AMOGREENTECH CO., LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cho, Geun Sik Incheon, KR 6 7
Lee, Jin Hyoung Incheon, KR 54 719
Moon, Il Soo Suwon-si, KR 1 2
Song, Yong Sul Seoul, KR 13 176

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