Method for making electro-optical device
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United States of America Patent
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Jun 20, 2017
Grant Date -
Mar 3, 2016
app pub date -
Sep 2, 2014
filing date -
Aug 14, 2012
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Abstract
An electro-optic device, comprising a layer of light-carrying material; and a rib, projecting from the layer of light-carrying material, for guiding optical signals propagating through the device. The layer of light-carrying material comprises a first doped region of a first type extending into the rib, and a second doped region of a second, different type extending into the rib such that a pn junction is formed within the rib. The pn junction extends substantially parallel to at least two contiguous faces of the rib, resulting in a more efficient device. In addition, a self-aligned fabrication process can be used in order to simplify the fabrication process and increase reliability and yield.
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