Charged-particle radiation apparatus

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United States of America Patent

PATENT NO 9685301
SERIAL NO

14433891

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Abstract

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The present invention provides a charged-particle radiation apparatus with a defect observation device for observing defects on a sample, the apparatus including a control unit and a display unit. The control unit is configured to execute a drift correction process on one or more images acquired with the defect observation device under a plurality of correction conditions, and display the plurality of correction conditions and a plurality of corrected images obtained through execution of the drift correction process in association with each other, as a first screen on the display unit.

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Patent Owner(s)

  • HITACHI HIGH-TECHNOLOGIES CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hirai, Takehiro Tokyo, JP 100 926
Nakagaki, Ryo Tokyo, JP 57 782
Obara, Kenji Tokyo, JP 57 507

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