Laser dicing device and dicing method

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United States of America Patent

PATENT NO 9685355
SERIAL NO

15252131

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A laser dicing device includes a laser light source, an AF light source, a light path of the processing laser light and a light path of the AF laser light being partially shared with each other, a condenser lens arranged on the shared light path between the first laser light and the second laser light, an AF signal processing unit that generates a focus error signal based on reflected light of the AF laser light reflected by the surface of the wafer, a controller that moves the condenser lens such that a distance between the condenser lens and the surface of the wafer is made constant based on the focus error signal, and a focus lens group that adjusts the position of the condensing point of the AF laser light in a state where the position of the condensing point of the processing laser light is fixed.

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Patent Owner(s)

Patent OwnerAddress
TOKYO SEIMITSU CO LTDHACHIOJI-SHI TOKYO 192-8515

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hyakumura, Kazushi Tokyo, JP 9 107

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