Multi-story substrate treating apparatus with flexible transport mechanisms and vertically divided treating units
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United States of America Patent
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Jun 27, 2017
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N/A
app pub date -
Sep 23, 2015
filing date -
Nov 30, 2007
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Abstract
A substrate treating apparatus includes a first treating block and a second treating block disposed adjacent to the first treating block. Each of the first treating block and the second treating block include a plurality of stories arranged vertically. Each of the plurality of stories includes treating units for treating substrates and a main transport mechanism for transporting the substrates to and from the treating units. The substrates are transportable between the stories of the first treating block and the stories of the second treating block at same heights as corresponding stories of the first treating block. The substrates are transportable between the stories of the first treating block and the stories of the second treating block at different heights from corresponding stories of the first treating block.
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