Polishing composition

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United States of America Patent

PATENT NO 9688884
APP PUB NO 20140342562A1
SERIAL NO

14359252

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Abstract

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A polishing composition of the present invention is to be used for polishing an object including a portion containing a high-mobility material and a portion containing a silicon material. The polishing composition comprises odd-shaped abrasive grains and an oxidizing agent having a standard electrode of 0.3 V or more, and preferably further contains a salt, such as an ammonium salt. The pH of the polishing composition is 1 or more and 6 or less, or 8 or more and 14 or less. The average degree of association of the abrasive grains, obtained by dividing the value of the average secondary particle diameter of the abrasive grains by the value of the average primary particle diameter of the abrasive grains, is preferably 1.6 or more.

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Patent Owner(s)

  • FUJIMI INCORPORATED

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Akatsuka, Tomohiko Kiyosu, JP 27 143
Tamada, Shuichi Kiyosu, JP 13 40
Yamato, Yasuyuki Kiyosu, JP 17 64
Yarita, Satoru Kiyosu, JP 20 22
Yokota, Shuugo Kiyosu, JP 11 53

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